Analysis of TihxOy Films Produced by Physical Vapor Deposition Method

dc.contributor.author	Urbonavicius, Marius
dc.contributor.author	Tuckute, Simona
dc.contributor.author	Karazhanov, Smagul
dc.contributor.author	Lelis, Martynas
dc.date.accessioned	2022-11-30T10:38:28Z
dc.date.available	2022-11-30T10:38:28Z
dc.date.created	2022-11-28T10:01:10Z
dc.date.issued	2022
dc.identifier.citation	Applied Sciences. 2022, 12 (21), .	en_US
dc.identifier.issn	2076-3417
dc.identifier.uri	https://hdl.handle.net/11250/3034995
dc.language.iso	eng	en_US
dc.rights	Navngivelse 4.0 Internasjonal	*
dc.rights.uri	http://creativecommons.org/licenses/by/4.0/deed.no	*
dc.title	Analysis of TihxOy Films Produced by Physical Vapor Deposition Method	en_US
dc.title.alternative	Analysis of TihxOy Films Produced by Physical Vapor Deposition Method	en_US
dc.type	Peer reviewed	en_US
dc.type	Journal article	en_US
dc.description.version	publishedVersion	en_US
dc.rights.holder	© 2022 by the authors. Licensee MDPI, Basel, Switzerland.	en_US
dc.source.pagenumber	9	en_US
dc.source.volume	12	en_US
dc.source.journal	Applied Sciences	en_US
dc.source.issue	21	en_US
dc.identifier.doi	10.3390/app122110811
dc.identifier.cristin	2082127
dc.relation.project	Norges forskningsråd: 300107	en_US
cristin.ispublished	true
cristin.fulltext	original
cristin.qualitycode	1

Med mindre annet er angitt, så er denne innførselen lisensiert som Navngivelse 4.0 Internasjonal