dc.contributor.author | Gong, Lei | |
dc.contributor.author | Zhou, Chunlan | |
dc.contributor.author | Zhu, Junjie | |
dc.contributor.author | Wang, Wenjing | |
dc.contributor.author | Fangxu, Ji | |
dc.date.accessioned | 2019-09-27T10:51:25Z | |
dc.date.available | 2019-09-27T10:51:25Z | |
dc.date.created | 2019-09-26T08:51:28Z | |
dc.date.issued | 2019 | |
dc.identifier.issn | 1757-8981 | |
dc.identifier.uri | http://hdl.handle.net/11250/2619130 | |
dc.description.abstract | A new passivation layer of AlOx/SiOx were prepared, in which 80 nm SiOx was prepared by spin-coating perhydropolysilazane (PHPS) and annealed at 450°C. In order to compare the passivation effect of single AlOx layers and the SiOx/AlOx stack on silicon surface, the fixed charge (Qf) in the passivated layers and chemical passivation effect were obtained by corona charge method. Fourier transform infrared spectroscopy (FTIR) and Time-of-flight secondary ion mass spectrometry (TOF-SIMS) was used to investigate the Si-H, Si-O bonds and the hydrogen profile in the passivation layer, respectively. The result reveals that the single layer of AlOx provides good field effect with a large amount of negative Qf. Furthermore, SiOx capping on AlOx have more excellent chemical passivation because of amount of H saturate the dangling bonds on the silicon surface. | nb_NO |
dc.language.iso | eng | nb_NO |
dc.rights | Navngivelse 4.0 Internasjonal | * |
dc.rights.uri | http://creativecommons.org/licenses/by/4.0/deed.no | * |
dc.title | Passivation Mechanisms of Atomic Layer-deposited AlOx Films and AlOx/SiOx Stack | nb_NO |
dc.type | Journal article | nb_NO |
dc.type | Peer reviewed | nb_NO |
dc.description.version | publishedVersion | nb_NO |
dc.source.volume | 585 | nb_NO |
dc.source.journal | IOP Conference Series: Materials Science and Engineering | nb_NO |
dc.source.issue | 1 | nb_NO |
dc.identifier.doi | 10.1088/1757-899X/585/1/012026 | |
dc.identifier.cristin | 1729281 | |
dc.relation.project | Norges forskningsråd: 261574 | nb_NO |
cristin.unitcode | 7492,1,3,0 | |
cristin.unitname | Solenergi | |
cristin.ispublished | true | |
cristin.fulltext | original | |
cristin.qualitycode | 1 | |