Experimental studies of thorium ion implantation from pulse laser plasma into thin silicon oxide layers

Borisyuk, P.V.; Chubunova, E.V.; Lebedinskii, Yu Yu; Tkalya, E.V.; Vasilyev, O.S.; Yakovlev, V.P.; Strugovshchikov, E.; Mamedov, D.; Pishtshev, A; Karazhanov, Smagul
Journal article, Peer reviewed
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http://hdl.handle.net/11250/2493974
Date
2018
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Original version
Laser Physics Letters. 2018, 15 (5), .   10.1088/1612-202X/aaacf8
Journal
Laser Physics Letters