New Approach for the Ablation of Dielectrics from Silicon Using Long Wavelength Lasers

Thorstensen, Jostein Bruun; Foss, Sean Erik
Journal article, Peer reviewed
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http://hdl.handle.net/11250/2451978
Date
2013
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Original version
Energy Procedia. 2013, 38 787-793.   10.1016/j.egypro.2013.07.347
Journal
Energy Procedia
Copyright
Copyright © 2013 The Authors. Published by Elsevier Ltd.
Attribution-NonCommercial-NoDerivatives 4.0 Internasjonal
Except where otherwise noted, this item's license is described as Attribution-NonCommercial-NoDerivatives 4.0 Internasjonal