Blar i IFE BRAGE på forfatter "Fangxu, Ji"
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Passivation Mechanisms of Atomic Layer-deposited AlOx Films and AlOx/SiOx Stack
Gong, Lei; Zhou, Chunlan; Zhu, Junjie; Wang, Wenjing; Fangxu, Ji (Journal article; Peer reviewed, 2019)A new passivation layer of AlOx/SiOx were prepared, in which 80 nm SiOx was prepared by spin-coating perhydropolysilazane (PHPS) and annealed at 450°C. In order to compare the passivation effect of single AlOx layers and ...